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A high quality surface nish grinding process to produce total reection mirror for x-ray uorescence analysis hitoshi ohmori1, shinjiro umezu1,2, yunji kim1, yoshihiro uehara1, hiroshi kasuga1, teruko kato1, nobuhide itoh1,3, syuhei kurokawa4, takayuki kusumi5, yugo sugawara6 and shinsuke kunimura6 1materials fabrication laboratory, riken, saitama 351-0198, japan.